Jinjun Feng *, Dapeng Ren, Hanyan Li,Ye Tang and Junyi Xing
National Key Laboratory of Science and Technology on Vacuum Electronics£¬Beijing Vacuum Electronics Research Institute, P. O. Box749-41, 100015
* Email: fengjj@ieee.org

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Abstract: The study of backward wave oscillators with folded waveguide circuits at frequencies at W band and Y band have been carried out in this paper. W band TWT with folded waveguide manufactured with EDM has reached continuous wave 10 W and pulsed 100 W at 20% duty in the authors' research group, while for higher frequency devices, we start from W band folded waveguide pencil beam BWO of 100 mW power level, for which the entire design and simulation have been finished and the permanent magnet system has been assembled and tested. Y band 220 GHz folded waveguide BWO with pencil beam for practical tubes and sheet beam for transmission experiment are also designed and simulated. The impedance and field flatness across the beam were monitored in the simulation. UV-LIGA and DRIE techniques are investigated for the research of micro-fabrication process for W band folded waveguide slow wave structures.
Keywords: BWO, MEMS, Terahertz.
Received: 2011-9-14
Published: 2011-12-31
Acknowledgments: The authors are grateful for the helpful discussion and beneficial suggestions from Professor Shaolun Cai and Professor Xianping Wu of Beijing Vacuum Electronics Research Institute.

Cite this article:
Jinjun Feng, Dapeng Ren, Hanyan Li,Ye Tang and Junyi Xing. (Invited Paper) Study of High Frequency Folded Waveguide BWO with MEMS Technology[J]. International Journal of Terahertz Science and Technology, 2011, Vol.4, No.4: 164-180. DOI:10.11906/TST.164-180.2011.12.23

URL: http://www.tstnetwork.org/10.11906/TST.164-180.2011.12.23
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