TST, Vol. 17, No. 3, PP. 38-46
(Invited paper) Accurate extraction of ultrabroadband terahertz conductivity of thin films
Hong Li 1, 2, Haoran Song 1, 2, 3, and Tianwu Wang 1, 2, 3, 4*
1 GBA Branch of Aerospace Information Research Institute, Chinese Academy of Sciences, Guangzhou 510700, China,
2 Guangdong Provincial Key Laboratory of Terahertz Quantum Electromagnetics, Guangzhou 510700, China
3 School of Electronic, Electrical and Communication Engineering, University of Chinese Academy of Sciences, Beijing 100049, China
4 Aerospace Information Research Institute, Chinese Academy of Sciences, Beijing 100094, China
*4 Email: wangtw@aircas.ac.cn
(Received September 2024)
Abstract: A thin film conductivity extraction algorithm has been developed for ultrabroadband terahertz time-domain spectroscopy (THz-TDS). To verify the accuracy of the extraction algorithm, the finite difference time-domain (FDTD) simulation has been performed. It turns out the complex conductivity extracted with the algorithm matches the predefined Drude response very well, while the conductivity calculated with the thin film equations differs dramatically. Finally, the extraction algorithm is applied to the transparent conducting oxides, and the significant divergence between the conductivities extracted with the two methods emphasizes that it is crucial to use the extraction algorithm to characterize the broadband terahertz conductivity of thin films.
Keywords: Thin films, Optical properties, Spectroscopy, Terahertz
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