International Journal of Terahertz Science and Technology
Vol.12, No.2, June 2019. PP.33-56 (2)
date2019-06-30 18:26:22 Click No.156

TST, Vol. 12, No. 2, PP. 33-47

(Invited paper) Terahertz microscopy and application in semiconductor testing

Limin Xu *, Tao Wang, Lianglun Cheng
Guangdong University of Technology
* Email:
19874253xulimin@163.com

(Recived June 11,2019)

Abstract: Terahertz microscopy can be classified into two categories according to resolution, micrometer microscopy and nanometer microscopy. Typical methods for these two kinds of microscopy are analyzed with particular stress on characteristics and potential application value. Some state-of-the-art terahertz microscopy products are introduced, as well as Electro-Optical Terahertz Pulse Reflectometry that utilizes ultrafast terahertz pulses to differentiate and locate faults of integrated circuits in semiconductor failure analysis laboratories. A brief discussion on the potential applications in semiconductor industry compared with other techniques is given in the final part to help those engaged in related research and development activities.

Keywords: Terahertz microscopy, Semiconductor Industry, Non-destructive testing.

doi: 10.11906/TST.033-047.2019.06.04

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TST, Vol. 12, No. 2, PP. 48-56

(Invited paper) Graphene surface plasmon polaritons excited by parallel electron beam

Gong Sen *, Hu Min, Zhong Renbing, Chen Xiaoxing, Zhang Ping, Zhao Tao, and Liu Shenggang
Cooperative Innovation Centre of THz Science, University of Electronic Science and Technology of China,Chengdu,610054, China
* Email:
Triwoods.uestc@163.com

(Received May 25, 2019 )

Abstract: In this paper, we present the parallel electron beam excitation of the surface plasmon polaritons (SPPs) in the double layer graphene sheets. The results of the theoretical analysis and numerical calculations show that the excited SPPs in the double layer graphene sheets have many characteristics and advantages compared to that in single layer graphene sheet. For the double layer graphene sheets, SPPs are spilt into two modes due to the coupling of SPPs, and the mode with higher frequency can be excited by parallel electron beam efficiently. The excited SPPs have higher operating frequencies and stronger field amplitudes than that in single layer graphene sheet, and the operating frequency can also be tuned by electron beam energy and chemical potential.

Keywords: Electron beam, Double layer graphene sheets, Surface plasmon polaritons

doi: 10.11906/TST.048-056.2019.06.05

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